Dual-output microelectromechanical resonator and method of manufacture and operation thereof
US11932530B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2023 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Feb 6, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2250/00
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An example resonating structure comprises a substrate, a resonator body, and an anchoring body for anchoring the resonator body to the substrate. The resonator body includes a layer of base material and, deposited on top of the layer of base material, a layer of mismatch material having a mismatch in temperature coefficient of elasticity (TCE) relative to the base material. The base material is doped with a dopant having a concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body. The thickness of the layer of the mismatch material is chosen so as to minimize a first order temperature coefficient of frequency for the resonator body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.