Patent · US Active

Gate valve device, cleaning method and mechanical apparatus

US11933416B2 · kind B2 · utility

0Cited by

8References

15Claims

0Family size

Assignee

CHANGXIN MEMORY TECHNOLOGIES, INC. · CN

Inventors

Zhengzheng Wang · Dongguan, CN
Liuguang WANG · Hefei, CN
Hongyang Wang · Hefei, CN
Jianqiao Yao · Hefei, CN

Key dates

Filing date	Nov 6, 2021
Grant date	Mar 19, 2024
Priority date	—
Expiry date	Nov 5, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67046
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A gate valve device includes a cleaning component, a first lifting component, and a second lifting component. The cleaning component is arranged on the second lifting component. The first lifting component is configured to control whether an opening on a side of a vacuum chamber close to a swing gate valve is in a closed state. The second lifting component is configured to, in a case that the opening on the side of the vacuum chamber close to the swing gate valve is in the closed state, control the cleaning component to clean the swing gate valve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.