Methods and apparatus to detect infrared wavelengths using a mechanical resonator with an integrated plasmonic infrared absorber
US11933670B2 · kind B2 · utility
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21Claims
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Key dates
| Filing date | Aug 31, 2021 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Apr 5, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/208
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An example apparatus includes: a semiconductor substrate; a mechanical resonator supported by the substrate, the mechanical resonator including an array of capacitors; and a plasmonic infrared (IR) absorber including an array of metal structures. The mechanical resonator is between the substrate and the IR absorber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.