Micro mirror arrays for measuring electromagnetic radiation
US11933722B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2022 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Sep 13, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation imaging apparatus includes an imaging surface; a light source; and an array of micro mirrors that rotate via radiation absorbed in the micro mirrors and reflect light from the light source to generate a distribution of reflected light on the imaging surface. The array first micro mirrors and second micro mirrors. The first micro mirrors have a first structure and the second micro mirrors have a second structure different than the first structure. The second structure is configured to correct for one or more environmental influences on the radiation imaging apparatus. A photodetector captures an image of the distribution of reflected light on the imaging surface. A processor is coupled to the photodetector. A communication interface is coupled with the processor; and a computing device is located separately from the radiation imaging apparatus and in communication with the communication interface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.