Superconducting multi-layer transition-edge sensor and hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor

US11933922B2 · kind B2 · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Daniel R. Schmidt · Ingelfingen, DE
• Joel C. Weber · Naperville, US

Key dates

• Filing date: Mar 5, 2021
• Grant date: Mar 19, 2024
• Expiry date: Jun 15, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N60/84
• WIPO field: Environmental technology
• WIPO sector: Chemistry

Abstract

Hybrid subtractive-additive production of a superconducting multi-layer transition-edge sensor includes: forming a superconductor layer; forming a patterning photoresist on the superconductor layer; forming a sensor pattern in the patterning photoresist; subtractively forming, from the superconductor layer, the superconductor sensor layer; removing the patterning photoresist from the superconductor sensor layer; forming a template photoresist on the superconductor sensor layer; forming an inverse normal metal layer pattern in the template photoresist and exposing a bilayer portion of the superconductor sensor layer for addition of a normal metal layer; and additively forming the normal metal layer on the superconductor sensor layer such that the sensor pattern is interposed between the normal metal layer and the substrate.