MEMS based spatial light modulators and applications
US11933962B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2022 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Feb 3, 2042 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/25
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Spatial light modulators (SLMs) and systems using same are described. Generally, the system includes a laser, a fixture holding a workpiece to be processed using the laser, illumination optics to illuminate the SLM with laser light, imaging optics to focus modulated light from the SLM onto the workpiece, and a controller to control the laser, the SLM, imaging optics and the fixture to scan the modulated light across a workpiece surface. The SLM includes an array of microelectromechanical system based diffractors, each including an electrostatically deflectable member coupled to a first light reflective surface and to bring light reflected from the first light reflective surface into interference with light reflected from a second light reflective surface in the SLM. The controller is operable to provide analog gray-scale control of an intensity of modulated light reflected from each diffractor by controlling an electrostatic force generated by a driver coupled thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.