Patent · US Active

Method to acquire a 3D image of a sample structure

US11935228B2 · kind B2 · utility

0Cited by

1References

26Claims

0Family size

Assignees

Carl Zeiss SMT GmbH · DE
CARL ZEISS X-RAY MICROSCOPY, INC. · US

Inventors

Ramani Pichumani · Palo Alto, US
Christoph Graf Vom Hagen · Oakland, US
Jens Timo Neumann · Shanghai, CN
Johannes Ruoff · Aalen, DE
Thomas Matthew Gregorich · San Diego, US

Key dates

Filing date	Oct 26, 2021
Grant date	Mar 19, 2024
Priority date	—
Expiry date	Apr 22, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG06T2211/424
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for acquiring a 3D image of a sample structure includes acquiring a first raw 2D set of 2D images of a sample structure at a limited number of raw sample planes; calculating a 3D image of the sample structure represented by a 3D volumetric image data set; and extracting a measurement parameter from the 3D volumetric image data set. A further number of interleaving 2D image acquisitions are recorded at a further number of interleaved sample planes which do not coincide with previous acquisition sample planes. The steps “calculating,” “extracting” and “assigning” are repeated for the further interleaving 2D set until convergence or a maximum number of 2D image acquisitions is recorded. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Such method can also be used to acquire virtual tomographic images of a sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.