Temperature control device
US11935767B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2019 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Jun 2, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N10/17
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.