Display device and manufacturing method thereof
US11937472B2 · kind B2 · utility
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23References
4Claims
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Key dates
| Filing date | Aug 19, 2021 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Aug 19, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/341
Abstract
An manufacturing method of a display device may include the following steps: forming a transistor on a substrate; forming an insulating layer on the transistor; forming a conductive layer including silver on the insulating layer; forming a photosensitive member on the conductive layer; forming an electrode of a light-emitting element by etching the conductive layer; performing plasma treatment on a structure that comprises the electrode, the plasma treatment using a gas including a halogen; and removing a product that is resulted from the plasma treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.