Multifunction magnetic and piezoresistive MEMS pressure sensor
US11937511B2 · kind B2 · utility
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3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2023 |
| Grant date | Mar 19, 2024 |
| Priority date | — |
| Expiry date | Feb 13, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/032
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.