Patent · US Active

Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structure

US11939215B2 · kind B2 · utility

0Cited by

1References

9Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Penny Weir · Reutlingen, DE
Markus Kuhnke · Wannweil, DE
Stefan Majoni · Holzgerlingen, DE

Key dates

Filing date	Oct 4, 2019
Grant date	Mar 26, 2024
Priority date	—
Expiry date	Dec 26, 2040

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A microelectromechanical structure, including a functional element situated in a cavity of the microelectromechanical structure. The functional element includes an aluminum nitride layer. The cavity is closed by a cap layer. The cap layer includes epitaxial silicon. A method for manufacturing a micromechanical structure is also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.