Position detection device and position detection method
US11940303B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2018 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Oct 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a position detection device to suppress an influence of a signal distortion due to a processing error or the like, the position detection device including: a reference position calculation unit that calculates a reference position of a moving body on the basis of a first signal and a second signal, the first signal being detected from a first track provided on the moving body and having a scale of predetermined cycles, and the second signal being detected from a second track provided on the moving body and having a scale of cycles less than the predetermined cycles; a slit specifying unit that specifies a slit corresponding to a position of the moving body; an in-slit position calculation unit that calculates an in-slit position of the moving body in the specified slit; and a correction unit that corrects an absolute position of the moving body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.