Driven-shield capacitive pressure sensor
US11940336B2 · kind B2 · utility
0Cited by
22References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 26, 2021 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Mar 26, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure transducer includes a shielded spacer positioned between the capacitor electrodes and driven with a separate voltage source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.