Particle measurement device, three-dimensional shape measurement device, prober device, particle measurement system, and particle measurement method
US11940463B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2023 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Aug 31, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.