Micromechanical component and method for producing a micromechanical component

US11940618B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Alexander Eberspaecher · Aalen, DE
• Frank Schatz · Kornwestheim, DE
• Janine Riedrich-Moeller · Warmbronn, DE
• Joerg Muchow · Reutlingen, DE
• Josip Mihaljevic · Holzgerlingen, DE
• Kerrin Doessel · Stuttgart, DE
• Ralf Boessendoerfer · Dinkelsbühl, DE
• Timo Schary · Grötzingen, DE

Key dates

• Filing date: Aug 20, 2019
• Grant date: Mar 26, 2024
• Expiry date: Jul 4, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0161
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical component. The micromechanical component includes: a mount; a displaceable part; and a first serpentine spring and a second serpentine spring which is embodied mirror-symmetrically with respect to the first serpentine spring in terms of a first plane of symmetry; a first actuator device and a second actuator device being embodied in such a way that by way of the first actuator device and the second actuator device, periodic deformations, mirror-symmetrical in terms of the first plane of symmetry, of the first serpentine spring and of the second serpentine spring are excitable; the micromechanical component also encompassing a first torsion spring and a second torsion spring that each extend along a rotation axis; and the displaceable part being displaceable, at least by way of the periodic and mirror-symmetrical deformations of the first serpentine spring and of the second serpentine spring, around the rotation axis with respect to the mount.