Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11942922B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2022 |
| Grant date | Mar 26, 2024 |
| Priority date | — |
| Expiry date | Mar 29, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern comprising an interdigital transducer (IDT), interleaved fingers of the IDT on the diaphragm. A ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.3. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.