Method for depositing a coating
US11945746B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Nov 15, 2021 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | Nov 28, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/1525
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention relates to a method of depositing a coating comprising zinc oxide on a substrate; to a chemical vapour deposition precursor mixture for use in same and to a coated glass article and a photovoltaic cell prepared with a zinc oxide coating prepared using the method which comprises: providing a substrate, providing a precursor mixture comprising an alkyl zinc compound and a phosphorus source, the phosphorus source comprising a compound of formula OnP(OR)3, wherein n is 0 or 1 and each R is hydrocarbyl, and delivering the precursor mixture to a surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.