Flexible conforming silicone rubber heater for complex geometry fluid lines and method
US11946583B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2021 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | Dec 1, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16L59/153
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A flexible, substantially lamellar silicone foam rubber-based heater for heating fluid lines such as high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses a flexible, oblong substantially longitudinally uniform heater body including an oblong block of a thermally conductive, resiliently compressible material for conforming the heater to a line of complexly shaped components connected in series. The block can be supported by a silicone rubber support layer in contact with a flexible heater element containing layer, and an outer silicone foam rubber insulation layer. Fasteners, such as separatable retaining bands spaced along the line can hold the heater in place. A matable pair of bodies, or a single folded body can enwrap the line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.