Thickness detection device, method and system
US11946739B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2020 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | Sep 25, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG07D7/164
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are a thickness detection device, method and system, a storage medium and a processor. The thickness detection device includes: a detection unit, including a plurality of thickness detection chips, wherein the thickness detection chips are sequentially arranged at least in a second direction; and a common unit, arranged opposite and spaced from the detection unit in a first direction, wherein distances between at least two positions of a first surface of the common unit and the detection unit are different, the second direction is perpendicular to the first direction and a moving direction of an object to be detected, and the first surface is a surface of the common unit which is close to the measurement unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.