Patent · US Active

Semiconductor device

US11948883B2 · kind B2 · utility

0Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 2, 2021
Grant dateApr 2, 2024
Priority date
Expiry dateJul 31, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D88/00
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device including a transistor on a substrate; an interlayer insulating layer on the transistor; a first metal-containing layer on the interlayer insulating layer; and a second metal-containing layer on the first metal-containing layer, wherein the second metal-containing layer includes a resistor, the resistor includes a first insulating layer on the first metal-containing layer; a resistor metal layer on the first insulating layer; and a second insulating layer on the resistor metal layer, and the resistor metal layer includes a recessed side surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.