Image sensor
US11948957B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2021 |
| Grant date | Apr 2, 2024 |
| Priority date | — |
| Expiry date | May 12, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
Abstract
An image sensor includes a substrate having a first surface and a second surface facing each other. A deep trench extends from the first surface to the second surface of the substrate and defines a pixel region within the substrate. A photoelectric conversion region is disposed within the pixel region. A shallow trench extends from the first surface of the substrate into the substrate and at least partially defines a pattern within the pixel region. In a plan view, the pattern has a first corner, a second corner facing the first corner in a first diagonal direction, a third corner, and a fourth corner facing the third corner in a second diagonal direction that crosses the first diagonal direction. In the plan view, a radius of curvature of the third corner is less than a radius of curvature of the first corner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.