Patent · US Active

Solid-state imaging device and electronic device including coupling structures for electrically interconnecting stacked semiconductor substrates

US11948961B2 · kind B2 · utility

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15Claims
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Key dates

Filing dateJul 20, 2022
Grant dateApr 2, 2024
Priority date
Expiry dateJul 20, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/08145
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A solid-state imaging device including a first substrate on which a pixel unit is formed, and a first semiconductor substrate and a first multi-layered wiring layer are stacked, a second substrate on which a circuit having a predetermined function is formed, and a second semiconductor substrate and a second multi-layered wiring layer are stacked, and a third substrate on which a circuit having a predetermined function is formed, and a third semiconductor substrate and a third multi-layered wiring layer are stacked. The first substrate, the second substrate, and the third substrate are stacked in this order. A first coupling structure for electrically coupling a circuit of the first substrate and the circuit of the second substrate to each other does not include a coupling structure formed from the first substrate as a base over bonding surfaces of the first substrate and the second substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.