Process for the preparation of fluorinated quartz glass

US11952302B2 · kind B2 · utility

Assignee

• HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

• Stefan Ochs · Bad Camberg, DE
• Thomas Kayser · Leipzig, DE
• Martin Trommer · Bitterfeld-Wolfen, DE
• Andreas Langner · Alzenau, DE
• Sascha Pihan · Aschaffenburg, DE
• Kay Schuster · Hanau, DE
• Michael Hünermann · Alzenau, DE

Key dates

• Filing date: Aug 6, 2021
• Grant date: Apr 9, 2024
• Expiry date: Jan 26, 2042

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C2203/40
• WIPO field: Other special machines
• WIPO sector: Mechanical engineering

Abstract

A process for the production of a fluorinated quartz glass including the steps of generating SiO2 particles in a synthesis burner; depositing the resulting SiO2 particles into a body; and vitrifying the resulting body, wherein a fluorinating agent having a boiling point greater than or equal to −10° C. is supplied to the synthesis burner.