Cutting apparatus and method of manufacturing display device by using same
US11958206B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2019 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Nov 23, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/683
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A cutting apparatus includes: a stage on which is disposed a preliminary stacked body from which a cut stacked body having an edge is formed; a cutting unit movable along a first direction corresponding to an extension direction of the edge of the cut stacked body and with which the preliminary stacked body is cut to form the cut stacked body; a first detaching unit movable in a direction forming an acute angle with the first direction and including a first detaching tool which contacts the cut stacked body in detaching of the cut stacked body from the carrier substrate; and a second detaching unit movable in a direction parallel to the first direction and including a second detaching tool which is inserted between the cut stacked body and the carrier substrate in the detaching of the cut stacked body from the carrier substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.