MEMS sensors and systems
US11959806B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2023 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Apr 10, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/053
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.