Multi-axis strain sensor
US11959819B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2021 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Oct 9, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/2287
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a strain sensor. The strain sensor according to embodiments of the inventive concept includes a flexible substrate, rigid patterns on the flexible substrate, the rigid patterns including a first pattern and a second pattern spaced apart from the first pattern in a first direction, a first electrode on the first pattern, a second electrode on the second pattern, the second electrode being spaced apart from the first electrode, and a piezoresistive layer connecting the first electrode and the second electrode. Here, each of the rigid patterns may have a stiffness greater than that of the flexible substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.