Piston mode lamb wave resonators
US11962283B2 · kind B2 · utility
0Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2022 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Dec 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/562
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Piston mode Lamb wave resonators are disclosed. A piston mode Lamb wave resonator can include a piezoelectric layer, such as an aluminum nitride layer, and an interdigital transducer on the piezoelectric layer. The piston mode Lamb wave resonator has an active region and a border region, in which the border region has a velocity with a lower magnitude than a velocity of the active region. The border region can suppress a transverse mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.