Composite film of 6FPBO and triple-shelled mesoporous silica hollow spheres and its preparation and use

US11965070B2 · kind B2 · utility

Assignee

• East China University of Science and Technology · CN

Inventors

• Qixin Zhuang · Shanghai, CN
• Zhe Zhang · Eindhoven, NL
• Xiaoyun Liu · Hangzhou City, CN
• Jian Xu · Nanhu, CN
• Wentao Wang · Tallahassee, US
• Zeyang Wu · 红钢城街道, CN
• Xiaohan Wu · Shanghai, CN
• Lihui Li · Beijing, CN

Key dates

• Filing date: Nov 1, 2021
• Grant date: Apr 23, 2024
• Expiry date: Aug 26, 2042

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08K9/04
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.