Activated gas generation apparatus
US11968768B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Aug 22, 2019 |
| Grant date | Apr 23, 2024 |
| Priority date | — |
| Expiry date | Aug 30, 2040 |
Classification
- Technology area (CPC —)General
Abstract
In the present invention, a high-voltage side electrode constituent part includes a dielectric electrode and metal electrodes formed on the upper surface of the dielectric electrode. The dielectric electrode has a structure in which a film thickness is continuously changed along an X direction. That is, the film thickness of the right end of the dielectric electrode is set to a thickness dA1; and the film thickness of the left end is set to a thickness dB1 (>dA1), and is continuously increased from the right end to the left end along the X direction.
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