Method and apparatus for the application of force to a sample using optical interrogation technique
US11971352B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 14, 2022 |
| Grant date | Apr 30, 2024 |
| Priority date | — |
| Expiry date | Jul 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1218
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement system configured to examine a sample. The system comprises an internally reflective element, a contact member, an actuator, an optical assembly, a sensor, and a controller. The contact member and the reflective element are configured to apply a force to the sample. The optical assembly is configured to scan the sample. Whereby prior to the scan, an initial force is applied to the sample, and after the scan, a resulting force is applied to the sample. The sensor is configured to detect the resulting force applied to the sample, and the controller is configured to receive a signal from the sensor indicative of the detected resulting force. The controller is further configured to control the actuator to adjust the force applied to the sample by the contact member and the internally reflective element from the resulting force to the initial force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.