Patent · US Active

Semiconductor structure and method of manufacturing a semiconductor structure

US11972973B1 · kind B1 · utility

0Cited by
5References
24Claims
0Family size

Inventor

Key dates

Filing dateOct 4, 2023
Grant dateApr 30, 2024
Priority date
Expiry dateOct 4, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L23/53238
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present application discloses a semiconductor structure and a method of manufacturing a semiconductor structure. The semiconductor structure includes a conductive line of an Nth metal layer, a first insulating layer, a dielectric layer, a second insulating layer, an interconnect base, and an interconnect body. The first insulating layer is on the conductive line and free from covering a portion of the conductive line. The dielectric layer is on the first insulating layer and free from covering the portion of the conductive line. The second insulating layer is on the dielectric layer and free from covering the portion of the conductive line. The interconnect base is laterally surrounded by the dielectric layer, the first insulating layer, and the second insulating layer. A top surface of the interconnect base and a top surface of the second insulating layer are coplanar.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.