Resonator for testing, method for manufacturing resonator for testing, and method for testing resonator
US11973488B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2023 |
| Grant date | Apr 30, 2024 |
| Priority date | — |
| Expiry date | Sep 26, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonator for testing, a method for manufacturing a resonator for testing, and a method for testing a resonator are provided. The resonator for testing includes: a testing substrate, a testing bottom electrode, a testing piezoelectric layer, a testing top electrode, at least one first testing electrode, and at least one second testing electrode. The first testing electrode is connected to the testing bottom electrode, the second testing electrode is connected to the testing top electrode, a spacing region is arranged between the first testing electrode and the second testing electrode, and a thickness between the testing piezoelectric layer and at least one of the first testing electrode and the second testing electrode is greater than a predetermined thickness to insulate the first testing electrode and the second testing electrode. With the technical solutions according to the present disclosure, the accuracy of the detected resonance frequency adjustment amount caused by the mass loading layer to be tested is improve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.