Patent · US Active

Multimodality multiplexed illumination for optical inspection systems

US11974046B2 · kind B2 · utility

0Cited by

5References

22Claims

0Family size

Inventors

Yigal Katzir · Rishon LeZion, IL
Ilia Lutsker · Kfar Sava, IL
Elie Meimoun · Jerusalem, IL

Key dates

Filing date	Aug 27, 2019
Grant date	Apr 30, 2024
Priority date	—
Expiry date	Oct 28, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/95646
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities, images of which are acquired by a single sensor forming part of the image sensing subsystem.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.