Microelectromechanical systems (“MEMS”) device having a built-in self-test (“BIST”) and a method of application of a BIST to measure MEMS health
US11975963B2 · kind B2 · utility
0Cited by
7References
8Claims
0Family size
Inventors
Key dates
| Filing date | Apr 16, 2021 |
| Grant date | May 7, 2024 |
| Priority date | — |
| Expiry date | Aug 11, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical systems (MEMS) device includes a MEMS die and an electrical circuit electrically connected to the MEMS die. The electrical circuit includes a first capacitor that produces a first output signal based on a signal received from the MEMS die, and a second capacitor that produces a second output signal based on a signal received from the MEMS die. The electrical circuit is configured to determine a nominal capacitance of the MEMS die based on a ratio of the first output signal to the second output signal and a ratio of the capacitances of the first and second capacitors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.