Ozone oxidation process for treatment of water containing azoles and azole-type compounds
US11975993B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2020 |
| Grant date | May 7, 2024 |
| Priority date | — |
| Expiry date | Feb 1, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2201/002
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
The present invention is generally directed to the use of an ozone oxidation process to remove azoles and azole-type compounds from wastewater. Specifically, the present invention is directed to a chemical treatment system for wastewater, including: an oxidation module receiving wastewater input and outputting an effluent; wherein the oxidation module removes azole-type compounds from the wastewater; and wherein the effluent has a reduction in azole-type compounds greater than ninety percent (90%). In accordance with some embodiments, the present invention provides an oxidation module receiving as inputs: wastewater received from a chemical mechanical polishing process and ozone gas received from an ozone generator; the oxidation module outputting an effluent; wherein the oxidation module removes azole-type compounds from the input wastewater; wherein the effluent has a reduction in azole-type compounds greater than ninety percent (90%); and wherein the oxidation module does not require ferrous treatment or solid-liquid separation before treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.