Organic vapor jet printing system
US11976360B2 · kind B2 · utility
0Cited by
34References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2023 |
| Grant date | May 7, 2024 |
| Priority date | — |
| Expiry date | Jan 20, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.