Quick-release valve module, reticle pod provided with quick-release valve module, and method for quickly providing quick-release valve module on a reticle pod
US11981483B2 · kind B2 · utility
0Cited by
16References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2020 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | Dec 12, 2042 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2279/51
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a quick-release valve module which includes a flexible grommet defining a channel, and a piston having a disc portion at an end thereof, wherein the disc portion of the piston is exposed to the flexible grommet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.