Apparatus for aligning device having fine pitch, apparatus for testing device having fine pitch, and device alignment method
US11982708B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2020 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | Mar 1, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for aligning a device having a fine pitch includes: a base plate, which has vacuum holes respectively formed at seating points for devices and suctions the devices with the vacuum pressure that allows minute movement as the vacuum pressure is applied in a state in which the devices are loaded; a jig plate, which is fixedly installed so as to be positioned on the upper portion of the base plate and has openings, in which the devices are received, in the same number as the number of the devices loaded on the base plate; and a base plate position adjusting means for finely moving the positions of the devices loaded on the base plate in X-Y-θ directions so as to position the devices in the openings (formed in the jig plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.