Non-radioactive plasma ion source
US11984309B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2021 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | Dec 22, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/2406
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-radioactive homogenous plasma ion source that is power efficient with greater electrode life longevity and performance (homogenous low temperature plasma for ion formation, stability, robustness) than alternative non-radioactive ion sources for generating analyte ions of either positive or negative charge. Its compact design minimizes the spacing between electrodes, reducing the power requirements needed to ignite and maintain plasma levels. The non-radioactive plasma ion source generally comprises a housing for retaining a uniquely designed ion source that generates a uniform distribution of plasma to maximize the generation of ions at a lower plasma temperature to minimize undesirable nitrogen oxide and ozone gasses, at least one planar electrode in one embodiment, a mounting head with a gas exhaust, and a chamber with a counterflow gas inlet, and an analyte gas inlet. The non-radioactive plasma source improves ion source reliability over existing non-radioactive sources that are less efficient with reduced electrode life longevity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.