Sensor with resonator supported on a substrate
US11984863B2 · kind B2 · utility
0Cited by
9References
20Claims
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Key dates
| Filing date | Jul 6, 2021 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | Aug 25, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/028
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A sensor that includes a substrate with a first side having a cavity extending into the first side. A resonator is connected to the substrate and extends over the cavity with the resonator including first and second electrodes overlapping on opposing sides of the piezoelectric crystal. The substrate is connected to the resonator such that one or more physical parameters exerted on the substrate are transferred to the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.