Piezoelectric element
US11985899B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2021 |
| Grant date | May 14, 2024 |
| Priority date | — |
| Expiry date | Feb 15, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1−dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X−1.05≤d≤A1·exp(−X/t1)+y0, where A1=1.68×1012, t1=0.0306, and y0=0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5<a1/(b1+b2+b3)<1.07.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.