MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements

US11987491B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Peter DÜRR · Stuttgart, DE
• Andreas Neudert · Dresden, DE
• Linda Skatulla · Reutlingen, DE

Key dates

• Filing date: Jan 4, 2022
• Grant date: May 21, 2024
• Expiry date: Nov 28, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0841
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS (micro-electromechanical system) actuator element includes a substrate, a stationary first electrode structure with an edge structure, a second electrode structure with an edge structure, wherein the second electrode structure is deflectably coupled to the substrate by means of a spring structure and electrostatically deflectable by means of the first electrode structure to move the edge structure of the second electrode structure into an intermediate position between a minimum and maximum vertical deflection position, wherein the minimum and maximum deflection position specify a maximum deflection path, wherein the edge structures of the first and second electrode structures are to each other and are vertically spaced apart in the minimum deflection position and wherein, in the maximum deflection position, the vertical immersion path of the edge structure of the second electrode structure into the edge structure of the first electrode structure is up to 0.5 times the maximum deflection path zS.