THz measuring device and THz measuring method for determining a layer thickness or a distance of a measurement object
US11988499B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 13, 2020 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Mar 1, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8422
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a THz measuring device for measuring a layer thickness of a wall (4a) of a measurement object (4) and/or of a distance (18) between boundary surfaces (4a, 4b) of a measurement object (4), comprising a transmitter and receiver unit (2) including a Terahertz-Sender and a Terahertz receiver, a controller means configured to determine the layer thickness of the wall (4a) of the measurement object (4) and/or a distance (18) between boundary surfaces (4b, 4c) of the measurement object (4) from a time-of-flight difference of the Terahertz radiation reflected on a first boundary surface (4b, 4c) of the wall (4a) of the measurement object (4) and the Terahertz radiation reflected on a second boundary surface (4b, 4c) of the wall (4a), where in the beam path (5) of the at least one transmitter and receiver unit (2) an adjustable optical unit (7) including a reflector is arranged, where a surface of the reflector is designed to deflect the irradiated Terahertz radiation and/or the Terahertz radiation reflected from the respective boundary surface (4b, 4c) for adjusting the optical axis (C) of the transmitter and receiver unit (2).Hereby, according to the invention, it…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.