Low thermal capacity micro-bolometer and associated manufacturing method
US11988560B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2020 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | May 1, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/204
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An infrared imaging micro-bolometer integrates a membrane assembled in suspension on a substrate by support arms. The membrane includes an absorbing material configured to capture infrared radiations and a thermometric material connected to the absorbing material configured to perform a transduction of the infrared radiations captured by the absorbing material The thermometric material is arranged on a surface area smaller than 0.4 times a surface area of the membrane. The membrane also includes at least one central dielectric layer arranged between the absorbing material and the thermometric material. Recesses are formed in the absorbing material and in the at least one dielectric layer in portions of the membrane devoid of the thermometric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.