Gas sensor MEMS structures and methods of fabrication thereof
US11988600B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Dec 8, 2017 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Sep 19, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensor, a method of manufacturing a gas sensor, a method for fabricating a micro electro-mechanical system (MEMS) die for a heater or thermopile, and a micro electro-mechanical system (MEMS) die for a heater or thermopile. The gas sensor comprises a first micro electro-mechanical system (MEMS) die comprising a light source; a second MEMS die comprising a light detector; a sample chamber disposes in an optical path between the light source and the light detector; and a holder substrate; wherein the first and second MEMS dies are disposed on the holder substrate in a vertical orientation relative to the holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.