Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus
US11988909B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 18, 2020 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Mar 23, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2232
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.