Method for producing an electro-optical phase shifter based on ferroelectric materials

US11988939B2 · kind B2 · utility

Assignee

• IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK · DE

Inventors

• Andreas Mai · Guben, DE
• Patrick Steglich · Berlin, DE
• Christian Mai · Großostheim, DE

Key dates

• Filing date: Feb 2, 2022
• Grant date: May 21, 2024
• Expiry date: Mar 9, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F2201/122
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present invention relates to producing an electro-optical phase shifter such that it may be integrated into a front-end of line of an electronic-photonic integrated circuit. A conducting bottom layer with a first refractive index is provided. A center layer including a ferroelectric material and with a second refractive index is provided on top of a first region of the conducting bottom layer, such that the center layer is not on top of a second region of the conducting bottom layer. A conducting top layer with a third refractive index is provided on top of the center layer. The second refractive index is lower than the first refractive index and lower than the third refractive index, such that the conducting bottom layer, the center layer, and the conducting top layer form a slot waveguide. A first electrical connector which connects the second region of the conducting bottom layer with an upper layer is provided. Additionally, a second electrical connector which connects the conducting top layer with the upper layer is provided. A first electrode and a second electrode are provided in the upper layer such that the first electrode connects to the second region of the conductin…