Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body
US11990362B2 · kind B2 · utility
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1References
19Claims
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Key dates
| Filing date | May 21, 2020 |
| Grant date | May 21, 2024 |
| Priority date | — |
| Expiry date | Jul 2, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.