Method for preparing a cross-size micro-nano structure array
US11992889B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2020 |
| Grant date | May 28, 2024 |
| Priority date | — |
| Expiry date | Dec 20, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23H2300/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method for preparing a cross-dimension micro-nano structure array includes: S1. providing a workpiece immersed in the electrolyte as the first electrode, providing a trimming wire electrode as the second electrode and setting it above the workpiece, providing an interference beam adjuster and outputting multi-beam laser interference to irradiate the surface of the workpiece; S2. The power supply between the first electrode and the second electrode forms a loop, and drives the trimming wire electrode to reciprocate relative to the workpiece, and the workpiece undergoes electrochemical dissolution or electrochemical deposition at the corresponding position of the trimming wire electrode, and form a micro-nano structure array without a mask, and solves the problem of low output power of the existing ultrashort pulse power supply, improves the processing accuracy of the micro-nano structure array, does not require electrolyte for high-speed flow, and improves system safety and reduce the cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.