Integrated circuit chip including gate electrode with oblique cut surface, and manufacturing method of the same
US11996364B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 8, 2021 |
| Grant date | May 28, 2024 |
| Priority date | — |
| Expiry date | Nov 23, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/014
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A circuit chip including a substrate, first and second channel active regions on the substrate, and extending in a first direction, the second channel active regions spaced apart from the first channel regions in a second direction intersecting the first direction, first and second gate electrodes intersecting the second channel active regions, third and fourth gate electrodes intersecting the first channel active regions, and a contact electrode between the first, second, third, and fourth gate electrodes. The contact electrode including a stem section in a vertical direction, and first and second branch sections extending from the stem section and contacting a respective source/drain region on the first and second channel active regions, the first gate electrode and the third gate electrode overlapping in the second direction, and including edge portions having widths decreasing as the first gate electrode and the third gate electrode extend toward facing ends thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.